SAN FRANCISCO—Chip equipment vendor Tegal Corp. said Friday (Dec. 30) it has sold more than 30 patents from its nanolayer deposition (NLD) patent portfolio for about $3.6 million.
Tegal (Petaluma, Calif.) did not identify the buyers of the patents. The company announced in September that it would seek to sell the patents, part of a sell off strategy that has seen the firm sell its legacy thin-film etch and physical vapor deposition product lines to OEM Group Inc. in March 2010 and its deep reactive ion etch assets to SPTS earlier this year.
http://www.eetimes.com/electronics-news/4219653/Tegal-to-sell-nanolayer-deposition-patents
Tegal said Friday it still hopes to fetch about $400,0000 more for its five or so remaining NLD patents. Discussions are ongoing for placement of Lot 4 of the portfolio, which applies to copper barrier and low-k dielectric technology, Tegal said.
"Interest in Lot 4 is coming primarily from IC device manufacturers, whereas interest in Lots 1 through 3 was driven largely by equipment manufacturers," said Robert Ditizio, Tegal's chief technologist, in a statement.
Tegal sells nanolayer deposition patents
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